Abbr. | Chemical formula | V.P. at T | |
---|---|---|---|
Al2O3 | TMA | Al(CH3)3 | 8.7 torr at 20 ¡É |
HfO2 | TEMAHf | Hf[(C2H5)(CH3)N]4 | 1.2 torr at 60 ¡É |
HfCl4 | HfCl4 | 1 torr at 190 ¡É | |
ZrO2 | TEMAHZr | Zr[(C2H5)(CH3)N]4 | 1 torr at 70 ¡É |
ZrCl4 | ZrCl4 | 1 torr at 186 ¡É | |
TiN | TiCl4 | TiCl4 | 1 torr at 20 ¡É |
TDMAT | Ti[N(CH3)2]4 | 1 torr at 60 ¡É | |
TaN | TaCl5 | TaCl5 | 1 torr at 111 ¡É |