BUSINESS
반도체(Semiconductor)관련
반도체(Semiconductor)관련
ROSATOM은 세계최대 우라늄 생산회사로서, 부산물로서 생산되는 Hafnium과 Zirconium을 여러 용도에 맞게 활용하고 있다.
특히 한국의 반도체 시장에 부응하기위해 고순도의 대량생산 체계를 진행중이다.
ROSATOM is the world's largest uranium producer and uses Hafnium and Zirconium produced as by-products for various purposes.
In particular, a high-purity mass production system is in progress to meet the Korean semiconductor market.
Hafnium Oxide
(HfO2)TDMAHf, TEMAHf 등과 같은 High-K ALD/CVD Precursor의 raw material Raw material of High-K ALD/CVD precursors such as TDMAHf, TEMAHf, etc.
Hafnium Tetrachloride
(HfCl4)TDMAHf, TEMAHf 등과 같은 High-K ALD/CVD Precursor 및 Metallocene Compound의 raw material Raw material of High-K ALD/CVD Precursor and Metallocene Compound such as TDMAHf, TEMAHf, etc.
Zirconium Tetrachloride
(ZrCl4)TDMAZr, TEMAZr, (BuCp)2ZrCl2, SBIZrCl2 등과 같은 High-K ALD/CVD Precursor 및 Metallocene Compound의 raw material Raw material of High-K ALD/CVD Precursor and Metallocene Compound such as TDMAZr, TEMAZr, (BuCp)2ZrCl2, SBIZrCl2, etc.
-
High-K for Metal Gate
-
Introduction of High-K Materials
